Nonvolatile semiconductor memory device and data erase method thereof

ABSTRACT

A nonvolatile semiconductor memory device according to an aspect includes a semiconductor substrate, a memory cell array, memory strings, drain side selection transistors, source side selection transistors, word lines, bit lines, a source line, a drain side selection gate line, a source side selection gate line, and a control circuit. The control circuit applies a first voltage to a selected bit line, thereby executing an erase operation on a selected memory string connected to the selected bit line, and the control circuit applies a second voltage to a non-selected bit line, thereby prohibiting the erase operation for the selected memory string connected to the non-selected bit line. The first voltage is more than the second voltage.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is based upon and claims the benefit of priority from the prior Japanese Patent Application No. 2011-124127, filed on Jun. 2, 2011, the entire contents of which are incorporated herein by reference.

FIELD

Embodiments described in this specification relate to an electrically data-rewritable nonvolatile semiconductor memory device and a data erase method thereof.

BACKGROUND

In order to improve bit density of a nonvolatile semiconductor memory device such as a NAND-type flash memory, memory cells are expected to be provided in multiple layers. As one of such examples, a stacked NAND-type flash memory in which a memory transistor is made using a vertical transistor has been proposed.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a figure illustrating a memory cell array MA and a peripheral circuit CC of a nonvolatile semiconductor memory device according to a first embodiment.

FIG. 2 is a perspective view illustrating a stacked structure of the memory cell array MA according to the first embodiment.

FIG. 3 is a cross sectional view illustrating a stacked structure of the memory cell array MA according to the first embodiment.

FIG. 4 is a top view illustrating a word line conductive layer 41 a.

FIG. 5 is a top view illustrating a source side conductive layer 51 a, a drain side conductive layer 51 b, and a dummy conductive layer 51 c.

FIG. 6 is a top view illustrating a source line layer 61 and a bit line layer 62.

FIG. 7 is a circuit diagram illustrating the peripheral circuit CC according to the first embodiment.

FIG. 8 is a figure illustrating a voltage applied to a bit line BL during an erase operation according to the first embodiment.

FIG. 9 is a figure illustrating voltages applied to memory units MU(1, 1), MU(2, 1) connected to a selected bit line BL(1) during the erase operation according to the first embodiment.

FIG. 10 is a figure illustrating voltages applied to memory units MU(1, 2), MU(2, 2) connected to a non-selected bit line BL(2) during the erase operation according to the first embodiment.

FIG. 11 is a figure illustrating voltages applied to the memory units MU(1, 1), MU(2, 1) connected to the selected bit line BL(1) during the erase operation according to a second embodiment.

FIG. 12 is a figure illustrating voltages applied to the memory units MU(1, 2), MU(2, 2) connected to the non-selected bit line BL(2) during the erase operation according to the second embodiment.

FIG. 13 is a figure illustrating a voltage applied to the bit line BL during the erase operation according to a third embodiment.

FIG. 14 is a timing chart showing the erase operation due to the control circuit CC shown in FIG. 7

DETAILED DESCRIPTION

A nonvolatile semiconductor memory device according to an aspect includes a semiconductor substrate, a memory cell array, a plurality of memory strings, a plurality of drain side selection transistor, a plurality of source side selection transistor, a plurality of word lines, a plurality of bit lines, a source line, a drain side selection gate line, a source side selection gate line, and a control circuit. The memory cell array includes the plurality of memory strings. The plurality of memory strings has a plurality of electrically rewritable memory transistors connected in series and stacked above the semiconductor substrate. One end of the drain side selection transistor is connected to a first end of a memory string. One end of the source side selection transistor is connected to a second end of the memory string. The plurality of word lines are arranged to be commonly connected to the plurality of memory strings. The plurality of bit lines are respectively connected to the other ends of the drain side selection transistors. The source line is commonly connected the gates of the drain side selection transistors. The source side selection gate line is commonly connected the gates of the source side selection transistors. The control circuit is configured to control a voltage applied to the memory cell array. The control circuit is configured to apply a first voltage to a selected bit line, thereby executing an erase operation on a selected memory string connected to the selected bit line, and the control circuit is configured to apply a second voltage to a non-selected bit line, thereby prohibiting the erase operation for the selected memory string connected to the non-selected bit line. The first voltage is more than the second voltage.

Embodiments of nonvolatile semiconductor memory devices will be hereinafter explained with reference to drawings.

First Embodiment Overall Configuration

First, overall configuration of a nonvolatile semiconductor memory device according to a first embodiment will be explained with reference to FIG. 1. The nonvolatile semiconductor memory device according to the first embodiment includes a memory cell array MA and a peripheral circuit CC as shown in FIG. 1. A specific configuration of the peripheral circuit CC will be explained in detail with reference to FIG. 7 later.

As shown in FIG. 1, the memory cell array MA includes m memory blocks MB(1), . . . MB(m). In the explanation below, when all the memory blocks ML(1) . . . (m) are collectively referred to, all the memory blocks ML(1) . . . (m) may be denoted as a memory block MB.

Bit lines BL are formed to extend in a column direction over a plurality of memory blocks MB with a predetermined pitch in a row direction.

Each memory block MB includes memory units MU(1, 1) to MU(2, n) arranged in a matrix form having n rows by 2 columns. The matrix form having n rows by 2 columns is merely an example, and the embodiment is not limited thereto. The memory unit MU includes a memory string MS, a source side selection transistor SSTr, and a drain side selection transistor SDTr. In the explanation below, the memory units MU(1,1) to (2, n) may not be distinguished from each other and may be simply denoted as memory units MU. One end of the memory unit MU is connected to the bit line BL, and the other end of the memory unit MU is connected to a source line SL.

As shown in FIG. 1, the memory string MS includes memory transistors MTr1 to MTr8 (memory cell) and a back gate transistor BTr connected in series. The memory transistors MTr1 to MTr4, MTr5 to MTr8 are respectively connected in series. The back gate transistor BTr is connected between the memory transistor MTr4 and the memory transistor MTr5.

The memory transistors MTr1 to MTr8 store data by accumulating charges in charge accumulation layers therein. The memory transistor MTr1 may be used as a dummy transistor DTr which is not used for storing data. The back gate transistor BTr is in conductive state when at least the memory string MS is selected as a target of operation.

In the memory blocks MB(1) to MB(m), word lines WL1 to WL8 are commonly connected to the respective gates of the memory transistors MTr1 to MTr8 arranged in a matrix form having n rows by 2 columns. A back gate line BG is commonly connected to the respective gates of the back gate transistors BTr in n rows by 2 columns.

A drain of the source side selection transistor SSTr is connected to a source of the memory string MS. A source of the source side selection transistor SSTr is connected to the source line SL. One source side selection gate line SGS(1) or SGS(2) is commonly connected to the gates of the n source side selection transistors SSTr arranged in a line in the row direction in each memory block MB. In the explanation below, the source side selection gate lines SGS(1), (2) may not be distinguished from each other and may be collectively denoted as source side selection gate lines SGS.

A source of the drain side selection transistor SDTr is connected to a drain of the memory string MS. A drain of the drain side selection transistor SDTr is connected to the bit line BL. One drain side selection gate line SGD(1) or SGD(2) is commonly connected to the gates of the n drain side selection transistors SDTr arranged in a line in the row direction in each memory block MB. In the explanation below, the drain side selection gate line SGD(1), (2) may not be distinguished from each other and may be collectively denoted as drain side selection gate lines SGD.

[Stacked Structure]

As shown in FIGS. 2 and 3, one memory block MB includes a back gate layer 30, a memory layer 40, a selection transistor layer 50, and a wiring layer 60, which are stacked in order on a semiconductor substrate 20. The back gate layer 30 functions as the back gate transistor BTr. The memory layer 40 functions as the memory transistors MTr1 to MTr8. The selection transistor layer 50 functions as the drain side selection transistor SDTr and the source side selection transistor SSTr. The wiring layer 60 functions as the source line SL and the bit line BL.

As shown in FIGS. 2 and 3, the back gate layer 30 has a back gate conductive layer 31. The back gate conductive layer 31 functions as the back gate line BG and the gate of the back gate transistor BTr. The back gate conductive layer 31 is formed to extend in a plate-like manner in two dimensions, i.e., a row direction and a column direction parallel to the semiconductor substrate 20. For example, the back gate conductive layer 31 is made of polysilicon (poly-Si).

As shown in FIG. 3, the back gate layer 30 includes a memory gate insulating layer 43 and a joining semiconductor layer 44B. The memory gate insulating layer 43 is provided between the joining semiconductor layer 44B and the back gate conductive layer 31. The joining semiconductor layer 44B functions as a body (channel) of the back gate transistor BTr. The joining semiconductor layer 44B is formed to engrave the back gate conductive layer 31. The joining semiconductor layer 44B is formed in a generally rectangular form of which longitudinal direction is the column direction when seen from the above. The joining semiconductor layer 44B is formed in a matrix form in the row direction and the column direction in one memory block MB. For example, the joining semiconductor layer 44B is made of polysilicon (poly-Si).

As shown in FIGS. 2 and 3, the memory layer 40 is formed in an upper layer of the back gate layer 30. The memory layer 40 includes four word line conductive layers 41 a to 41 d. The word line conductive layer 41 a functions as the word line WL4 and the gate of the memory transistor MTr4. The word line conductive layer 41 a also functions as the word line WL5 and the gate of the memory transistor MTr5. Likewise, the word line conductive layers 41 b to 41 d respectively function as the word lines WL1 to WL3 and the gates of the memory transistors MTr1 to MTr3. The word line conductive layers 41 b to 41 d respectively function as the word lines WL6 to WL8 and the gates of the memory transistors MTr6 to MTr8.

The word line conductive layers 41 a to 41 d are stacked with inter-layer insulating layers 45 interposed therebetween in the vertical direction. The word line conductive layers 41 a to 41 d are formed with a pitch in the column direction to extend with the row direction (direction perpendicular to the sheet surface of FIG. 3) being the longitudinal direction. For example, the word line conductive layers 41 a to 41 d are made of polysilicon (poly-Si).

As shown in FIG. 3, the memory layer 40 includes a memory gate insulating layer 43, columnar semiconductor layer 44A, and a dummy semiconductor layer 44D. The memory gate insulating layer 43 is provided between the columnar semiconductor layer 44A and the word line conductive layers 41 a to 41 d. The columnar semiconductor layer 44A functions as bodies (channels) of the memory transistors MTr1 to MTr8. The dummy semiconductor layer 44D does not function as the bodies of the memory transistors MTr1 to MTr8.

The memory gate insulating layer 43 includes a block insulating layer 43 a, a charge accumulation layer 43 b, and a tunnel insulating layer 43 c, which are arranged from a side surface sides of the word line conductive layers 41 a to 41 d to a side of the memory columnar semiconductor layer 44. The charge accumulation layer 43 b is configured to be able to accumulate charges.

The block insulating layer 43 a is formed with a predetermined thickness on the side surfaces of the word line conductive layers 41 a to 41 d. The charge accumulation layer 43 b is formed with a predetermined thickness on a side surface of the block insulating layer 43 a. The tunnel insulating layer 43 c is formed with a predetermined thickness on a side surface of the charge accumulation layer 43 b. The block insulating layer 43 a and the tunnel insulating layer 43 c are made of silicon oxide (SiO₂). The charge accumulation layer 43 b is made of silicon nitride (SiN).

The columnar semiconductor layer 44A is formed to penetrate through the word line conductive layers 41 a to 41 d and the inter-layer insulating layer 45. The columnar semiconductor layer 44A extends in a direction perpendicular to the semiconductor substrate 20. The pair of columnar semiconductor layers 44A is formed to be in consistent with a portion close to an end portion of the joining semiconductor layer 44B in the column direction. For example, the columnar semiconductor layer 44A is made of polysilicon (poly-Si). The dummy semiconductor layer 44D is formed to penetrate through the word line conductive layers 41 a to 41 d and the inter-layer insulating layer 45. Below the dummy semiconductor layer 44D, the back gate conductive layer 31 is not provided.

In the back gate layer 30 and the memory layer 40, the pair of columnar semiconductor layers 44A and the joining semiconductor layer 44B joined with the lower ends thereof constitute the memory semiconductor layer 44 functioning as a body (channel) of the memory string MS. The memory semiconductor layer 44 is formed in a U shape when seen in the row direction.

In other words, the configuration of the back gate layer 30 is such that the back gate conductive layer 31 surrounds a side surfaces and a lower surface of the joining semiconductor layer 44B with the memory gate insulating layer 43 interposed therebetween. In other words, the configuration of the memory layer 40 is such that the word line conductive layers 41 a to 41 d are formed to surround the side surfaces of the columnar semiconductor layer 44A with the memory gate insulating layer 43 interposed therebetween.

As shown in FIGS. 2 and 3, the selection transistor layer 50 includes the source side conductive layer 51 a, a drain side conductive layer 51 b, and a dummy conductive layer 51 c. The source side conductive layer 51 a functions as the source side selection gate line SGS and the gate of the source side selection transistor SSTr. The drain side conductive layer 51 b functions as the drain side selection gate line SGD and the gate of the drain side selection transistor SDTr. The dummy conductive layer 51 c does not function as the source side selection gate line SGS and the drain side selection gate line SGD.

The source side conductive layer 51 a is formed in an upper layer of one of the columnar semiconductor layers 44A constituting the memory semiconductor layer 44. The drain side conductive layer 51 b is in the same layer as the source side conductive layer 51 a, and is formed in an upper layer of the other of the columnar semiconductor layers 44A constituting the memory semiconductor layer 44. The dummy conductive layer 51 c is in the same layer as the source side conductive layer 51 a, and is arranged in a portion other than the upper layer of the columnar semiconductor layer 44A. The plurality of source side conductive layers 51 a, drain side conductive layers 51 b, and dummy conductive layers 51 c are formed to extend in the row direction with a predetermined pitch in the column direction. For example, the source side conductive layer 51 a and the drain side conductive layer 51 b are made of polysilicon (poly-Si).

As shown in FIG. 3, the selection transistor layer includes a source side gate insulating layer 53 a, a source side columnar semiconductor layer 54 a, a drain side gate insulating layer 53 b, a drain side columnar semiconductor layer 54 b, and a dummy semiconductor layer 54D. The source side columnar semiconductor layer 54 a functions as a body (channel) of the source side selection transistor SSTr. The drain side columnar semiconductor layer 54 b functions as a body (channel) of the drain side selection transistor SDTr.

The source side gate insulating layer 53 a is provided between the source side conductive layer 51 a and the source side columnar semiconductor layer 54 a. The source side columnar semiconductor layer 54 a is formed to penetrate through the source side conductive layer 51 a. The source side columnar semiconductor layer 54 a is connected to a side surface of the source side gate insulating layer 53 a and an upper surface of one of the pair of columnar semiconductor layers 44A, and is formed in a pillar shape extending in a direction perpendicular to the semiconductor substrate 20. For example, the source side columnar semiconductor layer 54 a is made of polysilicon (poly-Si).

The drain side gate insulating layer 53 b is provided between the drain side conductive layer 51 b and the drain side columnar semiconductor layer 54 b. The drain side columnar semiconductor layer 54 b is formed to penetrate through the drain side conductive layer 51 b. The drain side columnar semiconductor layer 54 b is connected to a side surface of the drain side gate insulating layer 53 b and an upper surface of the other of the pair of columnar semiconductor layers 44A, and is formed in a pillar shape extending in a direction perpendicular to the semiconductor substrate 20. For example, the drain side columnar semiconductor layer 54 b is made of polysilicon (poly-Si).

The dummy semiconductor layer 54D is formed to penetrate through the dummy conductive layer 51 c. The dummy semiconductor layer 54D is formed in an I shape. A lower surface of the dummy semiconductor layer 54D is in contact with an upper surface of the dummy semiconductor layer 44D.

The wiring layer 60 includes a source line layer 61, a bit line layer 62, and a plug layer 63. The source line layer 61 functions as the source line SL. The bit line layer 62 functions as the bit line BL.

The source line layer 61 is in contact with an upper surface of the source side columnar semiconductor layer 54 a and is formed to extend in the row direction. The bit line layer 62 is in contact with an upper surface of the drain side columnar semiconductor layer 54 b via the plug layer 63, and is formed to extend in the column direction. For example, the source line layer 61, the bit line layer 62, and the plug layer 63 are made of metallic materials such as tungsten.

Subsequently, the form of the word line conductive layer 41 a will be explained in detail with reference to FIG. 4. The word line conductive layers 41 b to 41 d have the same shapes as the word line conductive layer 41 a, and description thereabout is not repeated here.

As shown in FIG. 4, the pair of word line conductive layers 41 a is provided in one memory block MB. One of the word line conductive layers 41 a is formed in a T shape (protruding shape) when seen from the above. The other of the word line conductive layers 41 a is formed in a C shape (recessed shape) so as to face the T-shaped word line conductive layer 41 a.

Subsequently, the shapes of the source side conductive layer 51 a, the drain side conductive layer 51 b, and the dummy conductive layer 51 c will be explained in detail with reference to FIG. 5. As shown in FIG. 5, each of the source side conductive layer 51 a, the drain side conductive layer 51 b, and the dummy conductive layer 51 c is formed to extend in the row direction. As shown in FIG. 1, in the nonvolatile semiconductor memory device in which n by 2 memory strings are arranged in a matrix form in one memory block MB, one memory block MB is provided with a pair of (two) source side conductive layers 51 a, a pair of (two) drain side conductive layers 51 b, and a pair of (two) dummy conductive layers 51 c. The pair of dummy conductive layers 51 c is provided at both ends of the memory block MB in the column direction. The pair of source side conductive layers 51 a is respectively provided adjacent to the dummy conductive layers 51 c. The pair of drain side conductive layers 51 b is arranged at a position between the pair of source side conductive layers 51 a.

Subsequently, the shapes of the source line layer 61 and the bit line layer 62 will be explained in detail with reference to FIG. 6. The source line layers 61 are formed to extend in the row direction with a predetermined pitch in the column direction. In an upper layer of the source line layer 61, a common source line layer 64 extending in the column direction is provided. A plurality of source line layers 61 are commonly connected to one common source line layer 64 via the plug layer 65. The bit line layers are formed to extend in the column direction with a predetermined pitch in the row direction.

[Configuration of Peripheral Circuit CC]

Subsequently, the specific configuration of the peripheral circuit CC according to the above first embodiment will be explained with reference to FIG. 7. As shown in FIG. 7, the peripheral circuit CC includes an address decoder circuit 11, boosting circuits 12 a to 12 d, word line drive circuits 13 a, 13 b, a back gate line drive circuit 14, selection gate line drive circuits 15 a, 15 b, a source line drive circuit 16 a, a bit line drive circuit 16 b, a sense amplifier circuit 17, a sequencer 18, and row decoder circuits 19 a, 19 b. The peripheral circuit CC can apply different voltages to respective bit lines BL with the above bit line drive circuit 16 b.

The address decoder circuit 11 is connected to row decoders 19 a, 19 b via a bus. The address decoder circuit 11 outputs a signal BAD to the row decoder circuits 19 a, 19 b. The signal BAD is a signal for specifying a memory block MB (block address).

The boosting circuits 12 a to 12 d generate boosted voltage made by boosting a base voltage. The boosting circuit 12 a is connected to the word line drive circuits 13 a, 13 b. The boosting circuit 12 a transfers the boosted voltage to the word line drive circuits 13 a, 13 b. The boosting circuit 12 b is connected to the source line drive circuit 16 a. The boosting circuit 12 b outputs the boosted voltage to the source line drive circuit 16 a. The boosting circuit 12 c is connected to the bit line drive circuit 16 b. The boosting circuit 12 c outputs the boosted voltage to the bit line drive circuit 16 b. The boosting circuit 12 d is connected to the row decoder circuits 19 a, 19 b. The boosting circuit 12 d outputs a boosted signal RDEC to the row decoder circuits 19 a, 19 b.

The word line drive circuit 13 a is connected to the row decoder 19 a. The word line drive circuit 13 a outputs signals VCG5 to VCG8 to the row decoder 19 a. The word line drive circuit 13 b is connected to the row decoder 19 b. The word line drive circuit 13 b outputs signals VCG1 to VCG4 to the row decoder 19 b. The signals VCG1 to VCG8 are used to drive the word lines WL1 to WL8 within the selected memory block MB.

The back gate line drive circuit 14 is connected to the row decoder 19 b. The back gate line drive circuit 14 outputs a signal VBG to the row decoder 19 b. The signal VBG is used to drive the back gate line BG of the selected memory block MB.

The selection gate line drive circuit 15 a is connected to the row decoder 19 a. The selection gate line drive circuit 15 a outputs a signal VSGS2, a signal VSGD1, and a signal VSGOFF to the row decoder 19 a. The selection gate line drive circuit 15 b is connected to the row decoder 19 b. The selection gate line drive circuit 15 b outputs a signal VSGS1, a signal VSGD2, and a signal VSGOFF to the row decoder 19 b. The signals VSGS1, VSGS2 are used to respectively drive source side selection gate lines SGS(1), SGS(2) within the selected memory block MB. The signals VSGD1, VSGD2 are used to respectively drive the drain side selection gate lines SGD(1), SGD(2) within the selected memory block MB. The signal VSGOFF is used to drive the source side selection gate lines SGS(1), SGS(2) and the drain side selection gate lines SGD(1), SGD(2) within the non-selected memory block MB.

The signal VSGS2, the signal VSGD1, and the signal VSGOFF are input to various kinds of wires from the selection gate line drive circuit 15 a via the row decoder circuit 19 a. The signals VSGOFF, VSGD2, VSGS1 are input to various kinds of wires from the selection gate line drive circuit 15 b via the row decoder circuit 19 b.

The source line drive circuit 16 a is connected to the source line SL. The source line drive circuit 16 a outputs a signal VSL to the source line SL. The signal VSL is used to drive the source line SL. The bit line drive circuit 16 b is connected to the bit line BL. The bit line drive circuit 16 b selectively supplies a signals VBL(1), VBL(2) to the bit lines BL(1), BL(2) via a transfer transistors Tr. In addition, the bit line drive circuit 16 b supplies a signal VBLG to gates of the transfer transistors Tr to control a conductive state of the transfer transistors Tr. The signals VBL(1), VBL(2) are used to drive the bit line BL(1), BL(2). Note that, in FIG. 7, bit lines BL(3) to BL(n) are omitted.

The sense amplifier circuit 17 is connected to the bit line BL. The sense amplifier circuit 17 determines held data in the memory transistors MTr1 to MTr8 on the basis of change of the voltage of the bit line BL. The sequencer 18 is connected to the above circuits 11 to 17. The sequencer 18 supplies a control signal to the circuits 11 to 17, and controls these circuits.

One row decoder circuit 19 a, and one row decoder circuit 19 b are provided for one memory block MB, respectively. The row decoder 19 a is connected to the word lines WL5 to WL8, the source side selection gate line SGS(2), and the drain side selection gate line SGD(1). The row decoder 19 b is connected to the word lines WL1 to WL4, the back gate line BG, the drain side selection gate line SGD(2), and the source side selection gate line SGS(1).

The row decoder circuit 19 a inputs signals VCG5<i> to VCG8<i> to the gates of the memory transistors MTr5 to MTr8 via the word lines WL5 to 8 on the basis of the signal BAD and the signals VCG5 to VCG8. The row decoder circuit 19 a also selectively inputs the signal VSGS2<i> to the gate of the source side selection transistor SSTr located in the second column of the memory block MB via the source side selection gate line SGS(2) on the basis of the signal BAD, the signal VSGS2, and the signal SGOFF. The row decoder circuit 19 a also selectively inputs the signal VSGD1<i> to the gate of the drain side selection transistor SDTr located in the first column of the memory block MB via the drain side selection gate line SGD(1) on the basis of the signal BAD, the signal VSGD1, and the signal SGOFF.

The row decoder circuit 19 a includes a voltage conversion circuit 19 aa, first transfer transistors Tra1 to Tra6, and second transfer transistors Trb1, Trb2. The voltage conversion circuit 19 aa is connected to the address decoder circuit 11, the boosting circuit 12 d, gates of the first transfer transistors Tra1 to Tra6, and gates of the second transfer transistors Trb1, Trb2. The voltage conversion circuit 19 aa generates a signal VSELa<i> on the basis of the signal BAD and the signal RDEC, and outputs the signal VSELa<i> to the gates of the first transfer transistors Tra1 to Tra6. The voltage conversion circuit 19 aa generates a signal VUSELa<i> on the basis of the signal BAD, signal RDEC, and outputs the signal VUSELa<i> to the gates of the second transfer transistors Trb1, Trb2.

The first transfer transistors Tra1 to Tra4 are connected between the word line drive circuit 13 a and the word lines WL5 to WL8, respectively. The first transfer transistors Tra1 to Tra4 output the signals VCG5<i> to VCG8<i> to the word lines WL5 to WL8, respectively, on the basis of the signals VCG5 to VCG8, VSELa<i>. The first transfer transistor Tra5 is connected between the selection gate line drive circuit 15 a and the drain side selection gate line SGD(1). The first transfer transistor Tra6 is connected between the selection gate line drive circuit 15 a and the source side selection gate line SGS(2).

The second transfer transistor Trb1 is connected between the selection gate line drive circuit 15 a and the drain side selection gate line SGD(1). The second transfer transistor Trb2 is connected between the selection gate line drive circuit 15 a and the source side selection gate line SGS(2).

The row decoder circuit 19 b inputs the signals VCG1<i> to VCG4<i> to the gates of the memory transistors MTr1 to MTr4 via the word lines WL1 to 4 on the basis of the signal BAD and the signals VCG1 to VCG4. The row decoder circuit 19 b inputs a signal VBG<i> to the gate of the back gate transistor BTr via the back gate line BG on the basis of the signal BAD and the signal VBG. The row decoder circuit 19 b also selectively inputs the signal VSGS1<i> to the gate of the source side selection transistor SSTr located in the first column of the memory block MB via the source side selection gate line SGS(1) on the basis of the signal BAD, the signal VSGS1, and the signal SGOFF. The row decoder circuit 19 b also selectively inputs the signal VSGD2<i> to the gate of the drain side selection transistor SDTr located in the second column of the memory block MB via the drain side selection gate line SGD(2) on the basis of the signal BAD, the signal VSGD2, and the signal SGOFF.

The row decoder circuit 19 b includes a voltage conversion circuit 19 ba, first transfer transistors Trc1 to Trc7 and second transfer transistors Trd1, Trd2. The voltage conversion circuit 19 ba is connected to the address decoder circuit 11, the boosting circuit 12 d, gates of the first transfer transistors Trc1 to Trc7, and gates of the second transfer transistors Trd1, Trd2. The voltage conversion circuit 19 ba generates a signal VSELb<i> on the basis of the signal BAD and the signal RDEC, and outputs the signal VSELb<i> to the gates of the first transfer transistors Trc1 to Trc7. The voltage conversion circuit 19 ba generates a signal VUSELb<i> on the basis of the signal BAD and the signal RDEC, and outputs the signal VUSELb<i> to the gates of the second transfer transistors Trd1, Trd2.

The first transfer transistors Trc1 to Trc4 are connected between the word line drive circuit 13 b and the word lines WL1 to WL4, respectively. The first transfer transistors Trc1 to Trc4 output the signals VCG1<i> to VCG4<i> to the word lines WL1 to WL4, respectively, on the basis of the signals VCG1 to VCG4, VSELb<i>. The first transfer transistor Trc5 is connected between the back gate line drive circuit 14 and the back gate line BG. The first transfer transistor Trc5 outputs the signal VBG<i> to the back gate line BG on the basis of the signal VBG and the signal VSELb<i>. The first transfer transistor Trc6 is connected between the selection gate line drive circuit 15 b and the source side selection gate line SGS(1). The first transfer transistor Trc7 is connected between the selection gate line drive circuit 15 b and the drain side selection gate line SGD(2).

The second transfer transistor Trd1 is connected between the selection gate line drive circuit 15 b and the source side selection gate line SGS(1). The second transfer transistor Trd2 is connected between the selection gate line drive circuit 15 b and the drain side selection gate line SGD(2). Erase operation according to the first embodiment is enabled with the configuration of the peripheral circuit CC as shown in FIG. 7 explained above.

[Erase Operation]

Subsequently, erase operation according to the present embodiment will be explained with reference to FIG. 8. According to the erase operation as shown in FIG. 8, it is possible to selectively erase some of the memory transistors MTr included in one selected memory block MB. More specifically, in the selected memory block MB, only the memory units MU connected to the selected bit line BL are adopted as targets of the erase operation. The memory units MU connected to the non-selected bit line BL in the selected memory block MB are not adopted as a target of the erase operation. FIG. 8 illustrates voltages applied to the bit lines BL(1) to BL(8) when this selective erase operation is performed.

Previously, the same voltage is applied to all the bit lines BL, and data in all the memory transistors MTr included in one memory block MB are erased at a time. Therefore, when changing some of the data for performing overwrite of data, it is necessary to write back the data again after collective erase operation. It takes some time to perform this operation.

Accordingly, as shown in FIG. 8, in the first embodiment, operation is executed to selectively erase data in particular memory strings MS included in the plurality of memory strings MS in a memory block MB. For this operation, for example, the peripheral circuit CC applies 20 V to the odd-numbered bit lines BL(1), BL(3), BL(5), BL(7) (hereinafter referred to as selected bit lines BL) and applies 8 V to the even-numbered bit lines BL(2), BL(4), BL(6), BL(8) (hereinafter referred to as non-selected bit lines BL). Accordingly, the voltages of the bodies of the memory strings MS (memory transistors MTr1 to MTr8) are set at different voltages according to whether the memory string MS is connected to the selected bit line BL or connected to the non-selected bit line BL. Therefore, as shown in FIGS. 9 and 10 below, With control of the voltages of various kinds of wires, the peripheral circuit CC can selectively execute the erase operation only on the memory units MU connected to the selected bit line BL.

On the other hand, the peripheral circuit CC can prohibit the erase operation to the memory units MU connected to the non-selected bit line BL in the selected memory block MB.

As described above, in order to reduce the size of area of the circuit of the peripheral circuit such as the row decoder, the first embodiment employs a structure in which the plurality of memory strings MS arranged in a matrix form are commonly connected to one word line WL. For example, a comparative example will be considered where a plurality of memory strings MS (memory blocks) sharing a word line WL are adopted as the minimum unit for erasing data. In this comparative example, as the number of stacked word lines WL increases, the size of one memory block increases, and as a result, the minimum unit of data erase operation also increases. In the comparative example, when the minimum unit of data erase operation is reduced, the memory capacity of data substantially decreases. In contrast, the first embodiment is configured to selectively erase only some of the memory cells in one memory block. Accordingly, in the first embodiment, even if the number of stacked word lines WL increases, the unit of data erase operation does not increase. In the first embodiment, the data memory capacity does not decrease according to the erase operation.

Subsequently, with reference to FIGS. 9 and 10, voltages applied to various kinds of wires within the selected memory block MB(1) when the above selective erase operation is executed will be explained. In FIGS. 9 and 10, the memory transistor MTr1 is used as the dummy transistor DTr that is not used for store data. FIG. 9 illustrates voltages applied to memory units MU(1, 1), MU(2, 1) connected to the selected bit line BL(1) during erase operation in the selected memory block MB(1). FIG. 10 illustrates voltages applied to memory units MU(1, 2), MU(2, 2) connected to the non-selected bit line BL(2) during erase operation in the selected memory block MB(1).

First, the memory units MU(1, 1), MU(2, 1) within the selected memory block MB(1) connected to the selected bit line BL(1) will be explained with reference to FIG. 9. As shown in FIG. 9, 20 V is applied to the selected bit line BL(1), and on the other hand, 8 V is applied to the source line SL.

As shown in FIG. 9, 8 V is applied to the source side selection gate lines SGS(1), SGS(2). On the other hand, 12 V is applied to the drain side selection gate lines SGD(1), SGD(2). Accordingly, in the memory units MU(1, 1), MU(2, 1), a GIDL current is generated in proximity to the gate of the drain side selection transistor SDTr. Therefore, the charges generated by the GIDL current flows into the selected bit line BL(1), and on the other hand, the holes flow into the body of the memory string MS (memory transistors MTr2 to MTr8).

On the other hand, in the memory units MU(1, 1), MU(2, 1), generation of the GIDL current is prohibited in proximity to the gate of the source side selection transistor SSTr. In the memory units MU(1, 1), MU(2, 1), a voltage of 8 V is applied to the source line SL, and the same voltage, i.e., 8 V is also applied to the source side selection gate lines SGS(1), SGS(2). Accordingly, the source side selection transistor STr prohibits a movement of charges from the source line SL to the memory string MS.

As shown in FIG. 9, 20 V is applied to the word line WL1. On the other hand, a ground voltage GND is applied to the word lines WL2 to WL8 and the back gate line BG. Since 20 V is applied to the word line WL1, in the memory units MU(1, 1), MU(2, 1), the holes generated in the drain side selection transistor SDTr pass through the memory transistors MTr2 to 8 but do not pass through the dummy transistor DTr (memory transistor MTr1). Therefore, the voltages of the bodies of the memory transistors MTr2 to MTr8 can be increased to a voltage close to 20 V.

With a thus controlled potential difference between the bodies and the gates of the memory transistors MTr2 to MTr8, the erase operation is executed on the memory transistors MTr2 to MTr8 in the memory units MU(1, 1), MU(2, 1) connected to the selected bit line BL(1).

Subsequently, the memory units MU(1, 2), MU(2, 2) within the selected memory block MB(1) connected to the non-selected bit line BL(2) will be explained with reference to FIG. 10. As shown in FIG. 10, 8 V is applied to the non-selected bit line BL(2), and the same voltages as those of FIG. 9 are applied to the other wires.

Accordingly, as shown in FIG. 10, in the memory units MU(1, 2), MU(2, 2), generation of the GIDL current is prohibited in proximity to the gate of the source side selection transistor SSTr and in proximity to the gate of the drain side selection transistor SDTr. Accordingly, in the memory units MU(1, 2), MU(2, 2), the voltages of the bodies of the memory transistors MTr2 to MTr8 do not increase.

As a result, in the memory units MU(1, 2), MU(2, 2) connected to the non-selected bit line BL(2), erase operation for the memory transistors MTr2 to MTr8 is prohibited.

In the non-selected memory block MB(2), as shown in FIGS. 9 and 10, the word lines WL1 to WL8 are in floating state. Accordingly, in the non-selected memory block MB(2), erase operation for the memory transistors MTr2 to MTr8 is prohibited.

Second Embodiment Configuration

Subsequently, a nonvolatile semiconductor memory device according to a second embodiment will be explained. The second embodiment has the same configuration as the first embodiment. Therefore, description thereabout is not repeated here. In the second embodiment, erase operation explained below is different from that of the first embodiment.

[Erase Operation]

Erase operation of the nonvolatile semiconductor memory device according to the second embodiment will be explained. In the second embodiment, the voltages applied to the bit lines BL in the erase operation are the same as those of the first embodiment. In other words, the peripheral circuit CC selectively executes the erase operation on the memory units MU connected to the selected bit line BL, and on the other hand, the peripheral circuit CC prohibits the erase operation on the memory units MU connected to the non-selected bit line BL.

In the second embodiment, the memory transistor MTr1 is not used as the dummy transistor DTr, and is used to store data. Therefore, the voltages applied to various kinds of wires except the bit line BL in the erase operation are different from those of the first embodiment. Hereinafter, with reference to FIGS. 11 and 12, voltages applied to various kinds of wires within the selected memory block MB(1) when the above selective erase operation is executed will be explained. FIG. 11 illustrates voltages applied to memory units MU(1, 1), MU(2, 1) connected to the selected bit line BL(1) during erase operation in the selected memory block MB(1). FIG. 12 illustrates voltages applied to memory units MU(1, 2), MU(2, 2) connected to the non-selected bit line BL(2) during erase operation in the selected memory block MB(1).

First, the memory units MU(1, 1), MU(2, 1) within the selected memory block MB(1) connected to the selected bit line BL(1) will be explained with reference to FIG. 11. As shown in FIG. 11, 20 V is applied to the selected bit line BL(1), and 20 V is also applied to the source line SL.

As shown in FIG. 11, 12 V is applied to the source side selection gate lines SGS(1), SGS(2) and the drain side selection gate lines SGD(1), SGD(2). Accordingly, in the memory units MU(1, 1), MU(2, 1), a GIDL current is generated in proximity to the gate of the drain side selection transistor SDTr and in proximity to the gate of the source side selection transistor SSTr. Therefore, the charges generated by the GIDL current flows into the selected bit line BL(1) and the source line SL, and on the other hand, the holes move toward the body of the memory string MS (memory transistors MTr1 to MTr8).

As shown in FIG. 11, the ground voltage GND is applied to the word lines WL1 to WL8 and the back gate line BG. Accordingly, the bodies of the memory transistors MTr1 to MTr8 are filled with the holes generated in the drain side selection transistor SDTr and the source side selection transistor SSTr. Therefore, the voltages of the bodies of the memory transistors MTr1 to MTr8 increase to a voltage close to 20 V.

With a thus controlled potential difference between the bodies and the gates of the memory transistors MTr1 to MTr8, erase operation is executed on the memory transistors MTr1 to MTr8 in the memory units MU(1, 1), MU(2, 1) connected to the selected bit line BL(1).

As described above, in the second embodiment, GIDL currents are generated in proximity to the source side selection transistor SSTr and the drain side selection transistor SDTr. In other words, in the first embodiment, the GIDL current is generated at one end side of the memory string MS, but in the second embodiment, the GIDL currents are generated at both ends of the memory string MS. Therefore, the erase time of the second embodiment is less than the erase time of the first embodiment. In the second embodiment, data can be erased more uniformly and reliably as compared with the first embodiment.

Subsequently, the memory units MU(1, 2), MU(2, 2) within the selected memory block MB(1) connected to the non-selected bit line BL(2) will be explained with reference to FIG. 12. As shown in FIG. 12, 8 V is applied to the non-selected bit line BL(2), and the same voltages as those of FIG. 11 are applied to the other wires.

Accordingly, as shown in FIG. 12, in the memory units MU(1, 2), MU(2, 2), a GIDL current is generated in proximity to the gate of the source side selection transistor SSTr. Therefore, the electrons generated by the GIDL current flows into the source line SL, and on the other hand, and the holes flow into the body of the memory string MS (memory transistors MTr1 to MTr8). On the other hand, in the memory units MU(1, 2), MU(2, 2), the holes generated in the source side selection transistor SSTr flow into the non-selected bit line BL(2) via the drain side selection transistor SDTr. Accordingly, in the memory units MU(1, 2), MU(2, 2), the voltages of the bodies of the memory transistors MTr1 to MTr8 do not increase.

As a result, in the memory units MU(1, 2), MU(2, 2) connected to the non-selected bit line BL(2), erase operation for the memory transistors MTr1 to MTr8 is prohibited.

In the non-selected memory block MB(2), as shown in FIGS. 11 and 12, the word lines WL1 to WL8 are in floating state. Accordingly, in the non-selected memory block MB(2), erase operation for the memory transistors MTr1 to MTr8 is prohibited.

Third Embodiment Configuration

Subsequently, a nonvolatile semiconductor memory device according to a third embodiment will be explained. The third embodiment has the same configuration as the first embodiment. Therefore, description thereabout is not repeated here. In the third embodiment, erase operation explained below is different from that of the first embodiment.

[Erase Operation]

Erase operation of the nonvolatile semiconductor memory device according to the third embodiment will be explained with reference to FIG. 13. In the third embodiment, the voltages applied to the bit lines BL in the erase operation are different from those of the first and second embodiments. The third embodiment has the same configuration as the first embodiment. Therefore, description thereabout is not repeated here.

As shown in FIG. 13, in the third embodiment, during the erase operation, 20 V and 8 V are applied to every four bit lines BL arranged adjacent to each other in the column direction. Accordingly, the peripheral circuit CC selectively executes the erase operation on the memory units MU connected to the selected bit lines BL(1) to BL(4), and on the other hand, the peripheral circuit CC prohibits the erase operation on the memory units MU connected to the non-selected bit line BL(5) to BL(8).

As described above, in the third embodiment, 20 V and 8 V are applied to every four bit lines BL. Therefore, as compared with the first embodiment in which 20 V and 8 V are alternately applied to the bit lines BL, joining between the bit lines BL can be reduced in the third embodiment.

Other Embodiments

While certain embodiments of the inventions have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the inventions. Indeed, the novel methods and systems described herein may be embodied in a variety of other forms; furthermore, various omissions, substitutions and changes in the form of the methods and systems described herein may be made without departing from the spirit of the inventions. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the inventions.

For example, in the erase operation, voltages of the bit lines BL(1) and BL(2) may be controlled as shown in FIG. 14. FIG. 14 is a timing chart showing the erase operation due to the control circuit CC shown in FIG. 7. As shown in FIG. 14, at time t11, the control circuit CC raises voltages of the signals VBL(1), VBL(2), and VBLG to a power supply voltage Vdd. This causes the power supply voltage Vdd to be transferred to the bit lines BL(1) and BL(2). Additionally at time t11, in the selected memory block MB, the control circuit CC raises voltages of the word lines WL1 to WL8 (signals VCG1<i> to VCG8<i>), a voltage of the back gate line BG (signal VBG<i>), a voltage of the drain side select gate line SGD (signals VSGD1<i> and VSGD2<i>), and a voltage of the source side select gate line SGS (signals VSGS1<i> and VSGS2<i>) to a voltage Vdd-Vth.

Next, from time t12 through time t13, the control circuit CC raises the signal VBL(1) to an erase voltage Vera (20 V), raises the signal VBL(2) to an intermediate voltage Vmid (8 V), and raises the signal VBLG to a voltage Vera+Vth. This causes the erase voltage Vera to be transferred to the bit line BL(1), and the intermediate voltage Vmid to be transferred to the bit line BL(2). Additionally from time t12 through time t13, the control circuit CC raises the voltage of the drain side select gate line SGD (signals VSGD1<i> and VSGD2<i>) with a certain potential difference with the voltage of the bit line BL, whereby a voltage of a body of the drain side select transistor SDTr is raised. Additionally from time t12 through time t13, the control circuit CC raises the voltage of the source side select gate line SGS (signals VSGS1<i> and VSGS2<i>) with a certain potential difference with the voltage VSL of the source line SL, whereby a voltage of a body of the source side select transistor SSTr is raised.

Next, from time t13 through time t14, the control circuit CC sets the voltages of the word lines WL1 to WL8 (signals VCG1<i> to VCG8<i>) and the voltage of the back gate line BG (signal VBG<i>) to a ground voltage Vss. This results in the erase operation being executed on the memory transistor MTr from time t13 through time t14. 

1. A nonvolatile semiconductor memory device comprising: a semiconductor substrate; a memory cell array comprising a plurality of memory strings each having a plurality of electrically rewritable memory transistors connected in series and stacked above the semiconductor substrate; a plurality of drain side selection transistors each having one end connected to a first end of a memory string; a plurality of source side selection transistors each having one end connected to a second end of the memory string; a plurality of word lines arranged to be commonly connected to the plurality of memory strings; a plurality of bit lines respectively connected to the other ends of the drain side selection transistors; a source line connected to the other ends of the source side selection transistors; a drain side selection gate line commonly connected the gates of the drain side selection transistors; a source side selection gate line commonly connected the gates of the source side selection transistors; and a control circuit configured to control a voltage applied to the memory cell array, the control circuit being configured to apply a first voltage to a selected bit line, thereby executing an erase operation on a selected memory string connected to the selected bit line, the control circuit being configured to apply a second voltage to a non-selected bit line, thereby prohibiting the erase operation for the selected memory string connected to the non-selected bit line, the first voltage being more than the second voltage.
 2. The nonvolatile semiconductor memory device according to claim 1, wherein during the erase operation, the control circuit generates a third voltage with a potential difference between the selected bit line and a gate of a drain side selection transistor, and with the third voltage, a voltage of the body of the memory transistor is raised.
 3. The nonvolatile semiconductor memory device according to claim 1, wherein during the erase operation, the control circuit generates a third voltage with a potential difference between the source line and a gate of a source side selection transistor, and with the third voltage, a voltage of the body of the memory transistor is raised.
 4. The nonvolatile semiconductor memory device according to claim 2, wherein during the erase operation, the control circuit generates a fourth voltage with a potential difference between the source line and a gate of a source side selection transistor, and with the fourth voltage, a voltage of the body of the memory transistor is raised.
 5. The nonvolatile semiconductor memory device according to claim 2, wherein during the erase operation, the control circuit applies the second voltage to the source line and the source side selection gate line, and applies the first voltage to the plurality of word lines.
 6. The nonvolatile semiconductor memory device according to claim 1, wherein the plurality of bit lines are arranged in a first direction, the control circuit applies one of the first voltage and the second voltage to the bit lines located at an even-numbered position in the first direction, and the control circuit applies the other of the first voltage and the second voltage to the bit lines located at an odd-numbered position in the first direction.
 7. The nonvolatile semiconductor memory device according to claim 1, wherein the plurality of bit lines are arranged in a first direction, and the control circuit applies the first voltage or the second voltage to every first number of bit lines arranged adjacent to each other in the first direction.
 8. The nonvolatile semiconductor memory device according to claim 1, wherein each of the plurality of memory strings comprising: a first semiconductor layer including a columnar portion extending in a direction perpendicular to a substrate and functioning as a body of a memory transistor; a charge accumulation layer surrounding a side surface of the columnar portion and configured to be able to accumulate charges; and a word line conductive layer surrounding the side surface of the columnar portion via the charge accumulation layer and functioning as a word line and a gate of the memory transistor.
 9. The nonvolatile semiconductor memory device according to claim 1, wherein each of the drain side selection transistors includes: a second semiconductor layer extending in the direction perpendicular to the substrate and functioning as a body of a drain side selection transistor; a drain side gate insulating layer surrounding a side surface of the second semiconductor layer; and a drain side conductive layer surrounding the side surface of the second semiconductor layer via the drain side gate insulating layer and functioning as the drain side selection gate line and a gate of the drain side selection transistor.
 10. The nonvolatile semiconductor memory device according to claim 1, wherein each of the source side selection transistors includes: a third semiconductor layer extending in the direction perpendicular to the substrate and functioning as a body of a source side selection transistor; a source side gate insulating layer surrounding a side surface of the third semiconductor layer; and a source side conductive layer surrounding the side surface of the third semiconductor layer via the source side gate insulating layer and functioning as the source side selection gate line and a gate of the source side selection transistor.
 11. The nonvolatile semiconductor memory device according to claim 1, wherein the control circuit, from a first time to a second time, raises a voltage of the selected bit line to the first voltage and raises a voltage of the non-selected bit line to the second voltage, and from the first time to the second time, raises a voltage of the drain side select gate line with a potential difference with the selected bit line, and then, from the second time to a third time, sets voltages of the plurality of word lines to a ground voltage.
 12. The nonvolatile semiconductor memory device according to claim 1, wherein the control circuit executes the erase operation on a selected memory block in the memory cell array, while prohibits the erase operation for a non-selected memory block in the memory cell array, and the control circuit grounds the word lines in the selected memory block, and the control circuit sets the word lines in a floating state in the non-selected memory block.
 13. A data erase method for a nonvolatile semiconductor memory device, the nonvolatile semiconductor memory device comprising: a semiconductor substrate; a memory cell array comprising a plurality of memory strings each having a plurality of electrically rewritable memory transistors connected in series and stacked above the semiconductor substrate; a plurality of drain side selection transistors each having one end connected to a first end of a memory string; a plurality of source side selection transistors each having one end connected to a second end of the memory string; a plurality of word lines arranged to be commonly connected to the plurality of memory strings; a plurality of bit lines respectively connected to the other ends of the drain side selection transistors; a source line connected to the other ends of the source side selection transistors; a drain side selection gate line commonly connected the gates of the drain side selection transistors; and a source side selection gate line commonly connected the gates of the source side selection transistors, the data erase method applying a first voltage to a selected bit line, thereby executing an erase operation on a selected memory string connected to the selected bit line, the data erase method applying a second voltage to a non-selected bit line, thereby prohibiting the erase operation on the selected memory string connected to the non-selected bit line, the first voltage being more than the second voltage.
 14. The data erase method for the nonvolatile semiconductor memory device according to claim 13, during the erase operation, generating a third voltage with a potential difference between the selected bit line and a gate of a drain side selection transistor, wherein with the third voltage, a voltage of the body of the memory transistor is raised.
 15. The data erase method for the nonvolatile semiconductor memory device according to claim 13, during the erase operation, generating a third voltage with a potential difference between the source line and a gate of a source side selection transistor, wherein with the third voltage, a voltage of the body of the memory transistor is raised.
 16. The data erase method for the nonvolatile semiconductor memory device according to claim 14, during the erase operation, generating a fourth voltage with a potential difference between the source line and a gate of a source side selection transistor, wherein with the fourth voltage, a voltage of the body of the memory transistor is raised.
 17. The data erase method for the nonvolatile semiconductor memory device according to claim 14, during the erase operation, applying the second voltage to the source line and the source side selection gate line, and applying the first voltage to the plurality of word lines.
 18. The data erase method for the nonvolatile semiconductor memory device according to claim 13, wherein the plurality of bit lines are arranged in a first direction, the data erase method applies one of the first voltage and the second voltage to the bit lines located at an even-numbered position in the first direction, and the data erase method applies the other of the first voltage and the second voltage to the bit lines located at an odd-numbered position in the first direction.
 19. The data erase method for the nonvolatile semiconductor memory device according to claim 13, wherein the plurality of bit lines are arranged in a first direction, and the data erase method applies the first voltage or the second voltage to every first number of bit lines arranged adjacent to each other in the first direction.
 20. The data erase method for the nonvolatile semiconductor memory device according to claim 13, from a first time to a second time, raising a voltage of the selected bit line to the first voltage and raising a voltage of the non-selected bit line to the second voltage, and from the first time to the second time, raising a voltage of the drain side select gate line with a potential difference with the selected bit line, and then, from the second time to a third time, setting voltages of the plurality of word lines to a ground voltage. 